FACTOR-ANALYSIS AS A TOOL TO DECONVOLUTE AUGER-SPECTRA OF TUNGSTEN NITRIDES AND CARBIDES

Authors
RENIERS F HUBIN A TERRYN H VEREECKEN J
Citation
F. Reniers et al., FACTOR-ANALYSIS AS A TOOL TO DECONVOLUTE AUGER-SPECTRA OF TUNGSTEN NITRIDES AND CARBIDES, Surface and interface analysis, 21(6-7), 1994, pp. 483-489
Citations number
17
Categorie Soggetti
Chemistry Physical
Journal title
Surface and interface analysis → ACNP
ISSN journal
01422421
Volume
21
Issue
6-7
Year of publication
1994
Pages
483 - 489
Database
ISI
SICI code
0142-2421(1994)21:6-7<483:FAATTD>2.0.ZU;2-O
Abstract
Factor analysis was applied to Auger sputter profiles of tungsten carb ide and nitride samples. It is shown that very weak differences in the shapes of the metal peaks due to the presence of C and N can be isola ted unambiguously by factor analysis. The different chemical states of carbon, nitrogen and tungsten were clearly identified.