F. Reniers et al., FACTOR-ANALYSIS AS A TOOL TO DECONVOLUTE AUGER-SPECTRA OF TUNGSTEN NITRIDES AND CARBIDES, Surface and interface analysis, 21(6-7), 1994, pp. 483-489
Factor analysis was applied to Auger sputter profiles of tungsten carb
ide and nitride samples. It is shown that very weak differences in the
shapes of the metal peaks due to the presence of C and N can be isola
ted unambiguously by factor analysis. The different chemical states of
carbon, nitrogen and tungsten were clearly identified.