J. Zhang et al., THICKNESS DEPENDENCE OF SOFT-MAGNETIC PROPERTIES OF FE-SI(-N) ALLOY-FILMS, Journal of magnetism and magnetic materials, 131(1-2), 1994, pp. 278-284
The thickness dependence of soft magnetic properties was investigated
for Fe-Si and Fe-Si-N films. The results were compared with the predic
tions of Hoffmann's ripple theory. It was suggested that the optimum s
oft magnetic properties can be obtained for films with thickness aroun
d 2000 angstrom. Reducing the grain size as well as suppressing the co
lumn growth in the films lead to a way to improve the magnetic softnes
s of Fe-based films, and the nitrogenation of the films is an effectiv
e method to realize this purpose.