CORRUGATED STRUCTURES ON SI(110) SURFACES TREATED IN AMMONIUM FLUORIDE SOLUTIONS

We have investigated structures on Si (110) surfaces treated in ammoni um fluoride solutions using infrared light absorption spectroscopy and reflection high-energy electron diffraction. It has been found that t he surface is smoothed along the [11BAR0] direction, while corrugation remains across the [11BAR0] direction on an atomic scale. The surface has been found to be terminated by coupled monohydride with the same stretch vibration frequency of monohydride at step edges on vicinal Si (111) surfaces. The absorption coefficient of coupled monohydride has been compared to that of uncoupled monohydride on Si (111) terraces.