K. Fujita et N. Hirashita, CORRUGATED STRUCTURES ON SI(110) SURFACES TREATED IN AMMONIUM FLUORIDE SOLUTIONS, JPN J A P 2, 33(8B), 1994, pp. 120001145-120001148
We have investigated structures on Si (110) surfaces treated in ammoni
um fluoride solutions using infrared light absorption spectroscopy and
reflection high-energy electron diffraction. It has been found that t
he surface is smoothed along the [11BAR0] direction, while corrugation
remains across the [11BAR0] direction on an atomic scale. The surface
has been found to be terminated by coupled monohydride with the same
stretch vibration frequency of monohydride at step edges on vicinal Si
(111) surfaces. The absorption coefficient of coupled monohydride has
been compared to that of uncoupled monohydride on Si (111) terraces.