SURFACE-MORPHOLOGY OF PULSED-LASER DEPOSITED ALUMINUM NITRIDE THIN-FILMS

Authors
KOTULA PG CARTER CB NORTON MG
Citation
Pg. Kotula et al., SURFACE-MORPHOLOGY OF PULSED-LASER DEPOSITED ALUMINUM NITRIDE THIN-FILMS, Journal of materials science letters, 13(17), 1994, pp. 1275-1277
Citations number
19
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
13
Issue
17
Year of publication
1994
Pages
1275 - 1277
Database
ISI
SICI code
0261-8028(1994)13:17<1275:SOPDAN>2.0.ZU;2-T