H. Presting et al., SILICON MONOLITHIC MM-WAVE INTEGRATED-CIRCUIT (SIMMWIC) DEVICES MOUNTED UP-SIDE-DOWN ON A COPPER HEAT SINK INTEGRAL WITH CAVITY RESONATOR, IEEE transactions on microwave theory and techniques, 42(9), 1994, pp. 1837-1841
Silicon monolithic mm-wave integrated circuits (SIMMWIC) used as oscil
lators in radar system applications in the 60-80 GHz regime are mounte
d on a heat sink with integrated resonator. The heat sink consists of
a thin carrier plate (aluminum nitride (AlN) or copper (Cu) and and a
gold plated copper block with integrated resonator cavity. The resonat
or cavity is formed by a rectangular cavity milled in the Cu block, te
rminated on the top by the gold plated carrier plate on top of which a
mm-wave emitting integrated coplanar slot transmitter is mounted up-s
ide-down. The main part of the emitted RF power is radiated through th
e substrate-perpendicular to the chip plane-the other part is coupled
through a slit on the carrier plate into the resonator cavity leading
to a higher spectral purity and a stabilization of the oscillating fre
quency.