RBS AND ERD ANALYSIS USING LITHIUM IONS

The advantages of using ions heavier than alpha-particles for RBS anal ysis with a noticeable improvement of mass resolution, sensitivity and depth resolution in RBS are well known since the 1970s. The applicati ons are still very limited because of the uncertainty in stopping powe r, complicated detection techniques and the lesser accessibility of he avy ion beams. In this paper, we emphasize the applications of lithium ions for RBS and channeling analysis, based on the analysis of recent stopping power measurements and its systematic, the development of a silicon surface barrier detector for heavy ions as well as the accessi bility of lithium ions at small accelerators. Examples of RBS analysis of high temperature superconductors and other thin films will be pres ented, as well as ERD analysis of hydrogen in CVD samples using lithiu m ions.