ELASTIC RECOIL DETECTION ANALYSIS OF COADSORPTION OF HYDROGEN AND DEUTERIUM ON CLEAN SI SURFACES

Authors
OURA K NAITOH M MORIOKA H WATAMORI M SHOJI F
Citation
K. Oura et al., ELASTIC RECOIL DETECTION ANALYSIS OF COADSORPTION OF HYDROGEN AND DEUTERIUM ON CLEAN SI SURFACES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 344-346
Citations number
18
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
85
Issue
1-4
Year of publication
1994
Pages
344 - 346
Database
ISI
SICI code
0168-583X(1994)85:1-4<344:ERDAOC>2.0.ZU;2-3
Abstract
Quantitative analysis of hydrogen and deuterium coadsorbed on clean Si (111) surfaces has been carried out by elastic recoil detection analys is using a 6 Me V F3+ ion beam under an ultra high vacuum condition. H adsorption processes onto D-saturated Si(111) surfaces and vice versa have been studied in situ.