RECONSTRUCTION OF AR DEPTH PROFILES FROM PIXE MEASUREMENTS

Authors
OSIPOWICZ T LIEW SC LOH KK ORLIC I TANG SM WEBER T
Citation
T. Osipowicz et al., RECONSTRUCTION OF AR DEPTH PROFILES FROM PIXE MEASUREMENTS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 499-502
Citations number
16
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
85
Issue
1-4
Year of publication
1994
Pages
499 - 502
Database
ISI
SICI code
0168-583X(1994)85:1-4<499:ROADPF>2.0.ZU;2-#
Abstract
We report on the application of an iterative maximum likelihood algori thm [1] to the reconstruction of depth profiles from PIXE measurements . PIXE spectra of 450 and 800 keV Ar implanted Al samples were taken a t 1.5 and 1.3 MeV He+ energy and at angles ranging from 18 to 83-degre es. The measured Ar yields are in good agreement with those calculated by a PIXE simulation program. The reconstructed depth profiles are co mpared to those predicted by an ion implantation simulation code (TRIM ).