SETUP FOR MATERIALS ANALYSIS WITH HEAVY-ION BEAMS AT THE MUNICH MP TANDEM

Authors
ASSMANN W HARTUNG P HUBER H STAAT P STEFFENS H STEINHAUSEN C
Citation
W. Assmann et al., SETUP FOR MATERIALS ANALYSIS WITH HEAVY-ION BEAMS AT THE MUNICH MP TANDEM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 726-731
Citations number
18
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
85
Issue
1-4
Year of publication
1994
Pages
726 - 731
Database
ISI
SICI code
0168-583X(1994)85:1-4<726:SFMAWH>2.0.ZU;2-U
Abstract
A system has been installed for thin film analysis with two different techniques: Rutherford backscattering spectrometry (RBS) and elastic r ecoil detection analysis (ERDA). The mass resolution of heavy ion RBS is demonstrated on multilayers of YBaCuO using 30 MeV O-16 beams. The essential component of the ERDA system is an ionization detector with 7.5 msr solid angle and particle as well as position resolution. Depth resolution better than 10 nm and sensitivity below 10(14) at/cm2 coul d be achieved in ERDA of Al/Cu multilayers with 200 MeV Au ion beams. Angular resolution is sufficient to see blocking patterns of recoils f rom a Si single crystal.