A COMPARISON BETWEEN MEV PROTONS AND ALPHA-PARTICLES FOR IBIC ANALYSIS

Authors
BREESE MBH SOW CH JAMIESON DN WATT F
Citation
Mbh. Breese et al., A COMPARISON BETWEEN MEV PROTONS AND ALPHA-PARTICLES FOR IBIC ANALYSIS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 790-793
Citations number
12
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
85
Issue
1-4
Year of publication
1994
Pages
790 - 793
Database
ISI
SICI code
0168-583X(1994)85:1-4<790:ACBMPA>2.0.ZU;2-8
Abstract
There are two major problems with the IBIC (ion beam induced charge) t echnique which hampers its wider use for the analysis of semiconductor materials. The small measured charge pulses give a low signal to nois e ratio, and ion induced damage limits the maximum ion dose which can be used to form an IBIC image. This paper investigates the different c harge pulse heights obtained using MeV protons and alpha particles, an d the rate at which the ion induced damage decreases the measured char ge pulse height.