ION-INDUCED X-RAY-EMISSION AND ELECTRON-MICROSCOPY FOR THE INVESTIGATION OF MICROPARTICLES

Micro-particles deposited over membrane Nuclepore filters or other smo oth surfaces are well suited to be analyzed by PIXE (particle induced X-ray emission) and by electron probe techniques. The effect of the si ze of micro-particles on a surface sample when analyzed by macro-PIXE [11] is discussed. To analyze individual particles (sizes, distributio n, geometry, etc.) electron microscopy is the most accepted technique. A way to complement macro-PIXE and microscopy is described which pres ents some advantages over the sophisticated micro-PIXE systems. Second ary electron microscopy (SEM), electron micro-probe and optical micros copy were applied to aerosol and other similar samples. SEM micrograph s served to define some physical properties of particles through a dev eloping image processing program.