ION-BEAM-DEPOSITED BORON-CARBIDE COATINGS FOR THE EXTREME-ULTRAVIOLET

Authors
BLUMENSTOCK GM KESKIKUHA RAM
Citation
Gm. Blumenstock et Ram. Keskikuha, ION-BEAM-DEPOSITED BORON-CARBIDE COATINGS FOR THE EXTREME-ULTRAVIOLET, Applied optics, 33(25), 1994, pp. 5962-5963
Citations number
5
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
33
Issue
25
Year of publication
1994
Pages
5962 - 5963
Database
ISI
SICI code
0003-6935(1994)33:25<5962:IBCFTE>2.0.ZU;2-8
Abstract
The normal-incidence reflectance of ion-beam-deposited boron carbide t hin films has been evaluated in the extreme ultraviolet (EUV) spectral region. High-reflectance coatings have been produced with reflectance s greater than 30% between 67 and 121.6 nm. This high reflectance make s ion-beam-deposited boron carbide an attractive coating for EUV appli cations.