POLARIZED-LIGHT REFLECTOMETER

Authors
Citation
Rma. Azzam, POLARIZED-LIGHT REFLECTOMETER, Applied optics, 33(25), 1994, pp. 6009-6011
Citations number
18
Categorie Soggetti
Optics
Journal title
ISSN journal
00036935
Volume
33
Issue
25
Year of publication
1994
Pages
6009 - 6011
Database
ISI
SICI code
0003-6935(1994)33:25<6009:PR>2.0.ZU;2-O
Abstract
The modulated reflected and nonreflected light fluxes, measured as the azimuth of incident linearly polarized light is varied, yield the abs olute reflectances R(p) and R(s) of a dielectric or semiconductor surf ace. Application to a reflective Si detector determines the refractive index and thickness of a SiO2 film on the detector surface.