FABRICATION OF AU P-SI SCHOTTKY-BARRIER FOR EBIC STUDY/

Authors
ZHANG X JOY D
Citation
X. Zhang et D. Joy, FABRICATION OF AU P-SI SCHOTTKY-BARRIER FOR EBIC STUDY/, Microscopy research and technique, 29(1), 1994, pp. 47-53
Citations number
21
Categorie Soggetti
Microscopy,Biology
Journal title
Microscopy research and technique → ACNP
ISSN journal
1059910X
Volume
29
Issue
1
Year of publication
1994
Pages
47 - 53
Database
ISI
SICI code
1059-910X(1994)29:1<47:FOAPSF>2.0.ZU;2-U
Abstract
A simple method for the fabrication of a Au/p-Si Schottky barrier suit able for electron beam induced current (EBIC) study has been developed . The mechanical and electrical properties of the fabricated Au/p-Si S chottky barriers have been tested, and EBIC measurements of the disloc ation contrast have been conducted using the fabricated Schottky barri ers. (C) 1994 Wiley-Liss, Inc.