STRUCTURAL BEHAVIOR OF DIRECT-CURRENT SPUTTERED AND THERMALLY EVAPORATED MOLYBDENUM THIN-FILMS

Mo films were deposited on sintered polycrystalline MgO. These films e xhibited, depending on deposition conditions, two different structures , namely the normal body-centered cubic and an abnormal face-centered cubic. The analysis performed by electron diffraction and Auger electr on spectroscopy indicated that the fee structure assumed by molybdenum is an impurity-stabilized phase rather than a simple polymorphic tran sformation or dimolybdenum nitride (gamma Mo2N) as previously stated b y some authors.