MAPPING STRESS TO EVALUATE FILM UNIFORMITY

Authors
BLECH I ROBLES S
Citation
I. Blech et S. Robles, MAPPING STRESS TO EVALUATE FILM UNIFORMITY, Solid state technology, 37(9), 1994, pp. 75-77
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
9
Year of publication
1994
Pages
75 - 77
Database
ISI
SICI code
0038-111X(1994)37:9<75:MSTEFU>2.0.ZU;2-L