We have studied the effects of hydrogenation on the luminescence effic
iency of near-surface strained InGaAs/GaAs and unstrained GaAs/AlGaAs
quantum wells (QWs). By using two different materials with an analogou
s structure, we have been able to clarify the effects of substrate tem
perature, ion dosage, strain profile in the- material, and material qu
ality on the local hydrogen concentration. This in turn modifies the b
ehavior of hydrogen, the formation of hydrogen-related defects, and th
e variation of luminescence efficiency from the near-surface QW.