FAILURE DISTRIBUTIONS AND AREA TRANSFORMATION OF THIN SIO2-FILMS

Authors
DITALI A BLACK W
Citation
A. Ditali et W. Black, FAILURE DISTRIBUTIONS AND AREA TRANSFORMATION OF THIN SIO2-FILMS, Electronics Letters, 30(6), 1994, pp. 487-488
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
30
Issue
6
Year of publication
1994
Pages
487 - 488
Database
ISI
SICI code
0013-5194(1994)30:6<487:FDAATO>2.0.ZU;2-A
Abstract
The failure distributions of a small area can be transformed to distri butions of a larger area provided the data to be transformed exhibit a bimodal distribution with an extrinsic region that characterises the defect-related region explicitly. The defect density follows a power-l aw relationship that shows a decline in defect density as the area inc reases.