Nano-TiN films produced by Xe+ ion beam enhanced deposition were studi
ed by the slow positron annihilation technique. The Doppler broadening
of the annihilation gamma-ray energy spectra were characterized by th
e line-shape parameter S. The results showed that there are two types
of defect. One is related to interfaces and the other is related to na
no void. Their concentrations and sizes are strongly dependent upon th
e implanting energy and dosage.