3-DIMENSIONAL MICRO-FRESNEL OPTICAL-ELEMENTS FABRICATED BY MICROMACHINING TECHNIQUE

Authors
LIN LY LEE SS PISTER KSJ WU MC
Citation
Ly. Lin et al., 3-DIMENSIONAL MICRO-FRESNEL OPTICAL-ELEMENTS FABRICATED BY MICROMACHINING TECHNIQUE, Electronics Letters, 30(5), 1994, pp. 448-449
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
30
Issue
5
Year of publication
1994
Pages
448 - 449
Database
ISI
SICI code
0013-5194(1994)30:5<448:3MOFBM>2.0.ZU;2-2
Abstract
The authors report, for the first time, a three-dimensional binary pha se micro-Fresnel optical element standing perpendicular to the substra te. The optical element is fabricated by a micromachining technique. T he element has a diameter of 650mum a focal length of 0.5 mm and an op tical axis of 1 mm above the surface of the substrate. Light from an o ptical fibre is sucessfully collimated by the micro-optical element, a nd the beam profile closely approximates a Gaussian shape.