PHYSICAL-PROPERTIES OF MGO PARTIALLY-STABILIZED ZRO2 FILMS DEPOSITED BY COEVAPORATION

ZrO2 films partially stabilized with MgO in the concentration range 7. 6 - 26.1 mol % of MgO have been investigated. The deposition were achi eved by coevaporation using a double hearths electron-gun. X-rays diff raction patterns displayed polycrystalline structure. Cubic phase appe ars from 11.1 mol % MgO. The dielectric constant and the ac conductivi ty increase to maxima for 14.5 mol % MgO content whatever is the tempe rature in the range 27 degrees C-700 degrees C. It was also found that the film refractive index exhibits the same behaviour.