COMPARISON OF OPTICAL WAVE-GUIDE LOSSES IN SILICON-ON-INSULATOR

Authors
ZINKE T FISCHER U SPLETT A SCHUPPERT B PETERMANN K
Citation
T. Zinke et al., COMPARISON OF OPTICAL WAVE-GUIDE LOSSES IN SILICON-ON-INSULATOR, Electronics Letters, 29(23), 1993, pp. 2031-2033
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
29
Issue
23
Year of publication
1993
Pages
2031 - 2033
Database
ISI
SICI code
0013-5194(1993)29:23<2031:COOWLI>2.0.ZU;2-9
Abstract
Waveguide losses in SOI (silicon-on-insulator) material fabricated by different techniques are compared thus enabling us to confirm the theo retical dependence of losses on layer thickness. Single-mode waveguide losses in BE-SOI (bond and etchback-SOI) below 0.5dB/cm are reported for waveguides with cross-sections of several square micrometres.