DEMONSTRATION OF DIRECT BONDING BETWEEN INP AND GADOLINIUM GALLIUM GARNET (GD3GA5O12) SUBSTRATES

Authors
TOTOKI M MIZUMOTO T MARU K NAITO Y
Citation
M. Totoki et al., DEMONSTRATION OF DIRECT BONDING BETWEEN INP AND GADOLINIUM GALLIUM GARNET (GD3GA5O12) SUBSTRATES, Electronics Letters, 30(18), 1994, pp. 1534-1536
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
30
Issue
18
Year of publication
1994
Pages
1534 - 1536
Database
ISI
SICI code
0013-5194(1994)30:18<1534:DODBBI>2.0.ZU;2-2
Abstract
The authors demonstrate the direct bonding of InP/Gd3Ga5O12 (GGG) and InP/GaInSb on GGG without glue. After chemical treatment, heat treatme nt was applied in an H, atmosphere without a weight. This technique ma kes feasible the integration of semiconductor and magneto-optic device s.