SILICON TECHNOLOGY IN ION DETECTION - A HIGH-RESOLUTION DETECTOR ARRAY

Citation
K. Birkinshaw et Dp. Langstaff, SILICON TECHNOLOGY IN ION DETECTION - A HIGH-RESOLUTION DETECTOR ARRAY, International journal of mass spectrometry and ion processes, 132(3), 1994, pp. 193-206
Citations number
7
Categorie Soggetti
Spectroscopy,"Physics, Atomic, Molecular & Chemical
ISSN journal
01681176
Volume
132
Issue
3
Year of publication
1994
Pages
193 - 206
Database
ISI
SICI code
0168-1176(1994)132:3<193:STIID->2.0.ZU;2-L
Abstract
A new ion detector array integrated on a silicon chip with a high spat ial resolution has been designed at Aberystwyth. Integrated circuits a re mounted on a ceramic substrate beneath a microchannel plate electro n multiplier giving a small, light, low power, very low noise module. An array containing 384 detectors with a spatial resolution of 25 micr ons has been fully tested and test results are presented.