S. Fujii et al., PREPARATION OF LA-MODIFIED PBTIO3 THIN-FILMS ON THE OXIDE BUFFER LAYERS WITH NACL-TYPE STRUCTURE, Applied physics letters, 65(11), 1994, pp. 1463-1465
La-modified PbTiO3(PLT: Pb0.9La0.1Ti0.975O3) thin films by rf magnetro
n sputtering were prepared on the preferred (100)-oriented oxide buffe
r layers with NaCl-type structure, which were prepared by plasma-enhan
ced metalorganic chemical vapor deposition. Fused silica, (111)Si, sod
a-lime glass, and stainless steel were used as the substrates to prepa
re the oxide buffer layers. The c-axis and a-axis preferred oriented P
LT thin films were obtained on the buffer layer, independent of the ki
nd of substrate. Further, highly c-axis oriented PLT thin films were o
btained when the substrate had a large thermal expansion coefficient.
Significant pyroelectric currents were detected without a poling treat
ment. The NiCr/PLT/(100)Pt/(100)MgO/stainless steel structure had a di
electric constant of 250, a dielectric loss factor tan delta of 0.8%,
and a pyroelectric coefficient of 3.8 X 10(-4) C/M2 K.