Steps of monolayer height (0.28 nm) were observed by atomic force micr
oscopy on a GaAs surface grown by molecular beam epitaxy. The monolaye
r terrace width between steps was found to be as large as 1000 nm in s
ome areas. Surface reconstruction affects the surface diffusion proces
s during growth and the shape of the step edges. Growth spirals were o
bserved. Spirals originate from screw dislocations. The growth mechani
sm is according to the Burton-Cabrera-Frank theory.