MODULATED THERMAL PROFILING ON DEVICES

Authors
MAYWALD M PYLKKI RJ REINEKE FJ BALK LJ
Citation
M. Maywald et al., MODULATED THERMAL PROFILING ON DEVICES, Progress in Natural Science, 6, 1996, pp. 103-106
Citations number
6
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Progress in Natural Science → ACNP
ISSN journal
10020071
Volume
6
Year of publication
1996
Supplement
S
Pages
103 - 106
Database
ISI
SICI code
1002-0071(1996)6:<103:MTPOD>2.0.ZU;2-B
Abstract
Thermal structures of devices have been investigated using a scanning force microscope (SFM) based modulated heat source. The advantage of t he modulated technique is demonstrated on passivated and unpassivated samples.