Rj. Egan et al., GROWTH, MORPHOLOGY AND ELECTRICAL-TRANSPORT PROPERTIES OF MOCVD-GROWNP-INSB, Semiconductor science and technology, 9(9), 1994, pp. 1591-1597
p-type InSb was prepared from trimethyl indium and trimethyl antimony
at temperatures between 420 and 490-degrees-C. A narrow window in the
growth conditions of temperature and V/III ratio was found for InSb, w
ith non-uniform, inhomogeneous epilayer growth for conditions other th
an optimum. Optimum morphologies were achieved for V/III ratios betwee
n 2.2 and 2.5 and at a temperature of 450-degrees-C and the use of low
pressure in the growth of InSb was observed to result in an enhanced
uniformity. The InSb prepared displayed type conversion over the range
70-300 K; analysis of the transport properties is then complicated by
the contributions from two carriers. Calculations using Fermi-Dirac s
tatistics were carried out, identifying the majority carrier to be hol
es over the entire temperature range considered. Calculations also ide
ntify an acceptor level with activation energy of 16 +/- 0.5 meV, an a
cceptor concentration of (2.65 +/- 0.02) x 10(17) cm-3, in good agreem
ent with conductivity measurements, and a low-temperature hole mobilit
y of 450 cm2 V-1 s-1. The detailed analysis employing Fermi-Dirac stat
istics is then extended to determine the temperature dependence of the
Fermi level in InSb and InAs for various impurity compositions.