S. Dasneves et Ma. Depaoli, MONITORING THE ORGANIC CLEANING PROCESS OF INP CRYSTALS BY CONTACT-ANGLE MEASUREMENT, Semiconductor science and technology, 9(9), 1994, pp. 1719-1721
Water drop contact-angle measurements were used to monitor the organic
contamination cleaning process of InP crystals by refluxing in a sequ
ence of solvents. A single reflux in methanol reduces the contact angl
e by the same amount as a solvent sequence. MOCVD confirms the cleanli
ness of the InP crystals treated by a single reflux in methanol.