ZONE-PLATE X-RAY MICROSCOPE USING A LASER-PLASMA SOURCE

An imaging X-ray microscope using a laser plasma X-ray source, an obje ctive zone plate and an ellipsoidal condenser mirror with multilayer c oating is described. The 3.37 nm line emission from a carbon plasma is filtered and focused by the ellipsoidal condenser mirror and used as a light source. A magnified image (magnification: x 287) of a gold zon e plate was obtained by a back-illuminated charge coupled device (CCD) whose pixel size is 22 mu m x 22 mu m. The 0.4-mu m-period pattern (o utermost zones: 0.27 mu m line and 0.13 mu m space) is clearly resolve d.