INTERNAL ANALYZER INELASTIC-SCATTERING EFFECTS IN XPS QUANTITATIVE-ANALYSIS

The shape of spectrum in XPS depends on processes in the sample and on the properties of measurements systems. Noise, electron energy analys er resolution, electron inelastic scattering in the sample and analyse r, and non-monochromatic radiation produce a quality reduction of spec trum for quantitative analysis. The undesired scattering of electrons on the outer hemisphere of the analyser or into the lens system leads to spectral background shape distortion and difficulties in the analys is of intensity transmission and resolution functions. A new mathemati c procedure, based on deconvolution method, for evaluation and removin g instrumental artefact is proposed.