SIMULATION OF INSULATOR CHARGING BY A NARROW ELECTRON-BEAM

Citation
E. Vicario et al., SIMULATION OF INSULATOR CHARGING BY A NARROW ELECTRON-BEAM, Surface and interface analysis, 22(1-12), 1994, pp. 115-119
Citations number
8
Categorie Soggetti
Chemistry Physical
ISSN journal
01422421
Volume
22
Issue
1-12
Year of publication
1994
Pages
115 - 119
Database
ISI
SICI code
0142-2421(1994)22:1-12<115:SOICBA>2.0.ZU;2-S
Abstract
We are dealing with the problem of the charge distribution within an i nsulator (present application: SiO2) which is bombarded by a narrow el ectron beam. The electron trajectories within the sample are simulated via a single diffusion Monte-Carlo method. A mathematical model is pr oposed for the potential and the charge density. The development of an electric field, a potential and the broadening of the incident beam a re taken into account. These two last distributions appear to have a p rominent effect. It is shown that the charge distribution tends to a d ouble layer; the shape and thickness of positive and negative distribu tions are given.