CdS thin films were deposited on sapphire substrates and on the HgxCd1
-xTe epitaxial and single crystal samples by using chemical decomposit
ion on thiourea and anodic non-aqueous sulphidation techniques, respec
tively. The chemical composition and depth profiles of deposited films
were investigated by selected area XPS combined with Ar+ ion sputteri
ng. Lateral homogeneity of CdS films was studied by using scanning Aug
er microscopy. Nearly stoichiometric CdS films were obtained on sapphi
re and HgxCe1-xTe. The thickness, chemical composition and sputtering
rate at 2 keV ion energy were determined from XPS data. In both cases
(either deposited on sapphire or on HgxCd1-xTe) the CdS films were fou
nd to be very non-homogeneous in thickness.