XPS AND AES STUDY OF AL2O3 TI6AL4V INTERFACE - INFLUENCE OF OXIDATIONAND NITRURATION OF THE METAL-SURFACE/

Important properties of the coating/substrate combination like hardnes s, stress and, in particular, adhesion rely partly on the morphology a nd microstructure of the interface, which is often physically and chem ically different from the substrate as well as from the coating. The a im of this work is to study the influence of the chemical state of the metal surface on the structure of the interface Al2O3/Ti6A14V, obtain ed by deposition via sputtering of the ceramic. For this purpose three different surface treatments of the substrate were performed: air oxi dation, cleaning by Ar+ sputtering and nitrogen ion implantation. The chemical composition of the treated surfaces was assessed by x-ray pho toelectron spectroscopy, while the composition of the interfaces was i nvestigated by Auger electron spectroscopy depth profiling.