Si-based (Si-C-N and Si-C-Al) nanopowders prepared by laser synthesis
process have been studied by XPS and XAES analyses. The changes of the
silicon coordination as a function of the carbon fraction in Si-C-N p
owders have been investigated by a detailed analysis of Si 2p and Si K
LL lines and the measurements of the Auger parameter E(k)(Si KLL) + E(
b)(Si 2p). The non-linear dependence of the Auger parameter on the car
bon fraction has been interpreted as due to the formation of a carboni
tride nanophase, indicating that the ternary powders are not merely a
mixture of silicon carbide and silicon nitride. In Si-C-Al powders it
has been found that the incorporation of aluminium results in a modifi
ed structure of the silicon carbide, as shown by the variation of the
different spectral features.