LOW-ENERGY FIELD-EMISSION AUGER-ELECTRON SPECTROSCOPY

As one of the most powerful surface analytical techniques, Auger elect ron spectroscopy (AES) has repeatedly shown itself to be invaluable in solving problems involving submicron spatially resolved features. Rec ent developments of this technique towards higher spatial resolution a t low primary beam energies and high-sensitivity chemical state analys is have extended the application of AES as a problem-solving tool. The MICROLAB 310-F from Fisons Instruments (VG Scientific) uses a Schottk y field emission source and optimized electron optics to give unparall eled performance at low primary beam energies (3 keV or less) and up t o 50 times the unsable beam current density when compared to a convent ional LaB6 emitter. Two examples of analysis of small features will be shown, demonstrating the advantages of a low primary beam energy for AES analysis.