XPS ANALYSIS OF SOL-GEL PROCESSED DOPED AND UNDOPED TIO2 FILMS FOR SENSORS

Citation
R. Zanoni et al., XPS ANALYSIS OF SOL-GEL PROCESSED DOPED AND UNDOPED TIO2 FILMS FOR SENSORS, Surface and interface analysis, 22(1-12), 1994, pp. 376-379
Citations number
21
Categorie Soggetti
Chemistry Physical
ISSN journal
01422421
Volume
22
Issue
1-12
Year of publication
1994
Pages
376 - 379
Database
ISI
SICI code
0142-2421(1994)22:1-12<376:XAOSPD>2.0.ZU;2-4
Abstract
We have used x-ray photoelectron spectroscopy (XPS) to probe the actua l surface composition of alkali-doped and undoped TiO2 films prepared by the sol-gel technique. The role of thermal pretreatments, conducted at various temperatures, and the effect of doping with Na are discuss ed. XPS results are compared with the electrical response of prototype devices having TiO2 films as the active element, with the help of ele ctrochemical impedance spectroscopy (EIS) measurements.