R. Zanoni et al., XPS ANALYSIS OF SOL-GEL PROCESSED DOPED AND UNDOPED TIO2 FILMS FOR SENSORS, Surface and interface analysis, 22(1-12), 1994, pp. 376-379
We have used x-ray photoelectron spectroscopy (XPS) to probe the actua
l surface composition of alkali-doped and undoped TiO2 films prepared
by the sol-gel technique. The role of thermal pretreatments, conducted
at various temperatures, and the effect of doping with Na are discuss
ed. XPS results are compared with the electrical response of prototype
devices having TiO2 films as the active element, with the help of ele
ctrochemical impedance spectroscopy (EIS) measurements.