THERMAL CHARACTERIZATION OF MICROELECTRONICS MATERIALS AT VARIOUS SCALES

Authors
FOURNIER D POTTIER L PLAMANN K PELISSONNIER C THOREL A QUEYROUX F
Citation
D. Fournier et al., THERMAL CHARACTERIZATION OF MICROELECTRONICS MATERIALS AT VARIOUS SCALES, Progress in Natural Science, 6, 1996, pp. 467-470
Citations number
3
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Progress in Natural Science → ACNP
ISSN journal
10020071
Volume
6
Year of publication
1996
Supplement
S
Pages
467 - 470
Database
ISI
SICI code
1002-0071(1996)6:<467:TCOMMA>2.0.ZU;2-L
Abstract
It is of importance to characterize ceramics devoted to microelectroni cs applications such as polycristalline diamond, AIN and Al2O3 at vari ous scales. Photothermal experiments will be shown as efficient experi mental probes.