HYBRID PLASMA CHEMICAL-VAPOR-DEPOSITION OF ALUMINUM NITRIDE FROM AL AND NH3 N-2 MIXTURES/

Authors
AHMED W TITHER D
Citation
W. Ahmed et D. Tither, HYBRID PLASMA CHEMICAL-VAPOR-DEPOSITION OF ALUMINUM NITRIDE FROM AL AND NH3 N-2 MIXTURES/, Journal of materials science letters, 16(5), 1997, pp. 412-415
Citations number
13
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
16
Issue
5
Year of publication
1997
Pages
412 - 415
Database
ISI
SICI code
0261-8028(1997)16:5<412:HPCOAN>2.0.ZU;2-9