PHOTOACOUSTIC SUBSURFACE DEFECTS INSPECTION IN SEMICONDUCTOR TECHNOLOGY

Authors
BURBELO RM KUCHEROV IY KUZMICH AG
Citation
Rm. Burbelo et al., PHOTOACOUSTIC SUBSURFACE DEFECTS INSPECTION IN SEMICONDUCTOR TECHNOLOGY, Progress in Natural Science, 6, 1996, pp. 528-530
Citations number
5
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Progress in Natural Science → ACNP
ISSN journal
10020071
Volume
6
Year of publication
1996
Supplement
S
Pages
528 - 530
Database
ISI
SICI code
1002-0071(1996)6:<528:PSDIIS>2.0.ZU;2-Y
Abstract
This paper presents the data obtained using the photoacoustic microsco py with piezoelectric detection of PA signal, It is shown the possibil ity of vizualisation of subsurface damages and inhomogeneities is sili con epitaxial structures.