EVALUATION OF ROM CHIPS USING MODULATED PHOTO-REFLECTANCE TECHNIQUE

Authors
HE J ZHANG Y QIAN ZL GUO YY WANG HB
Citation
J. He et al., EVALUATION OF ROM CHIPS USING MODULATED PHOTO-REFLECTANCE TECHNIQUE, Progress in Natural Science, 6, 1996, pp. 531-534
Citations number
9
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Progress in Natural Science → ACNP
ISSN journal
10020071
Volume
6
Year of publication
1996
Supplement
S
Pages
531 - 534
Database
ISI
SICI code
1002-0071(1996)6:<531:EORCUM>2.0.ZU;2-Y
Abstract
The Modulated Photo-Reflectance (MPR) imaging technique has successful ly been used to evaluate the logic state quality of MOS structured ROM chips. in addition, the detection mechanism involving the influence o f the SiO2 layer is presented.