Cj. Mellor et al., A PATTERNED GATE ARCHITECTURE FOR THE STUDY OF HIGH-QUALITY ALGAAS GAAS SYSTEMS IN THE EXTREME QUANTUM LIMIT/, Semiconductor science and technology, 9(4), 1994, pp. 392-397
The success of Schottky gates in defining patterns in the two-dimensio
nal electron system (2DES) of AlGaAs/GaAs heterostructures has general
ly been limited to 2DESS located within 150 nm of the semiconductor su
rface. We describe the fabrication and use of an insulated gate archit
ecture which reduces gate leakage currents for the higher biases requi
red to define patterns in a 2DES located up to 700 nm below the semico
nductor surface. This architecture is important for periodic gate patt
erns which extend over macroscopic distances, where the increased leak
age current through Schottky gates can severely limit the range of the
gate bias. We report photoluminescence spectra obtained while biasing
a grid-patterned insulated gate defined over a 1.6 mm by 1.6 mm area
and above a low-electron-density, high-electron-mobility heterostructu
re. This is the first report of a patterned gate architecture suitable
for optical and transport studies of the effect of controlled periodi
city on a high-quality 2DES and its low-temperature ground states in a
magnetic field, in particular the magnetically induced Wigner solid.