The Raman spectra of titanium nitride thin films with various N defici
encies have been observed. Both the first and second order Raman scatt
erings are presented; the former increases with decreasing N concentra
tion. The spectra in these thin film samples are better than those in
bulk samples as shown in the previous results. A new low frequency mod
e is clearly resolved and can be explained as the second order differe
nce band.