USE OF FOURIER-TRANSFORM IN GRAZING X-RAYS REFLECTOMETRY

Authors
BRIDOU F PARDO B
Citation
F. Bridou et B. Pardo, USE OF FOURIER-TRANSFORM IN GRAZING X-RAYS REFLECTOMETRY, Journal de physique. III, 4(9), 1994, pp. 1523-1531
Citations number
8
Categorie Soggetti
Material Science","Phsycs, Fluid & Plasmas","Physics, Applied
Journal title
Journal de physique. III → ACNP
ISSN journal
11554320
Volume
4
Issue
9
Year of publication
1994
Pages
1523 - 1531
Database
ISI
SICI code
1155-4320(1994)4:9<1523:UOFIGX>2.0.ZU;2-W
Abstract
Grazing X-ray reflectometry allows the analysis of thin layer stacks. The fitting of the reflectivity curve by a trial and error method can be used in order to determine the parameters of the films. Fourier ana lysis of the experimental reflectivity can directly give a rough deter mination of the profil index. Application to real examples shows the v alidity of the method.