EFFECT OF POINT-SPREAD FUNCTIONS ON PRECISION EDGE MEASUREMENT

Citation
Rg. White et Ra. Schowengerdt, EFFECT OF POINT-SPREAD FUNCTIONS ON PRECISION EDGE MEASUREMENT, Journal of the Optical Society of America. A, Optics, image science,and vision., 11(10), 1994, pp. 2593-2603
Citations number
23
Categorie Soggetti
Optics
ISSN journal
10847529
Volume
11
Issue
10
Year of publication
1994
Pages
2593 - 2603
Database
ISI
SICI code
1084-7529(1994)11:10<2593:EOPFOP>2.0.ZU;2-L
Abstract
We explore the effect that an image-formation system's point-spread fu nction (PSF) has on measurement of the orientation and position of ste p edges. The theory of locales is used for numerical computation of bo unds on precision as a function of PSF size and shape. It is shown tha t in the noise-free case the PSF should be 0.5-0.9 pixel in radius for optimal precision to be achieved. PSF shape is shown to have a much l esser effect on precision. A one-dimensional noisy-edge model is analy zed, and results Similar to the no-noise case are obtained.