MORE INFORMATION ON THE CALIBRATION OF SCANNING STYLUS MICROSCOPES BY2-DIMENSIONAL FAST FOURIER-TRANSFORM ANALYSIS

An analysis of two-dimensional fast Fourier transform from images of p eriodical lattices (like highly oriented pyrolytic graphite) has been performed to understand and decouple the various parameters which acco unt for distorted images in stylus microscopy. The effects of the vari ous sources of image distortion have been described by means of linear maps and a mathematical approach has been developed to find the vario us correction coefficients resulting from the Fourier space analysis w hich restore the correct geometry of the images. Furthermore, the tren d analysis of the distortion angle upon the scanning frequency shows t he possibility of decoupling the role of ''static'' and ''time depende nt'' distortion parameters. This possibility may be used for an a prio ri prediction of possible distortions in stylus microscopy and thus fo r a real-time correction of the images during scanning.