Zq. Xie et Cm. Lyneis, PLASMA POTENTIALS AND PERFORMANCE OF THE ADVANCED ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE, Review of scientific instruments, 65(9), 1994, pp. 2947-2952
The mean plasma potential was measured on the LBL advanced electron cy
clotron resonance (AECR) ion source for a variety of conditions. The m
ean potentials for plasmas of oxygen, argon, and argon mixed with oxyg
en in the AECR were determined. These plasma potentials are positive w
ith respect to the plasma chamber wall and are on the order of tens of
volts. Electrons injected into the plasma by an electron gun or from
an aluminum oxide wall coating with a very high secondary electron emi
ssion reduce the plasma potential as does gas mixing. A lower plasma p
otential in the AECR source coincides with enhanced production of high
charged state ions indicating longer ion confinement times. The effec
t of the extra electrons from external injection or wall coatings is t
o lower the average plasma potential and to increase the n(e) tau(i) o
f the ECR plasma. With sufficient extra electrons, the need for gas mi
xing can be eliminated or reduced to a lower level so the source can o
perate at lower neutral pressures. A reduction of the neutral pressure
decreases charge exchange between ions and neutrals and enhances the
production of high charge state ions. An aluminum oxide coating result
s in the lowest plasma potential among the three methods discussed and
the best source performance.