PC-BASED SPINNING ROTOR GAUGE CONTROLLER

The spinning rotor gage (SRG) is a molecular drag vacuum gage. Commerc ial versions are available that operate between about 10(-4) and 1 Pa. In this paper we describe the design, and present performance data fo r a new SRG controller that uses a plug-in peripheral board and a pers onal computer (PC) to perform all control, signal processing, and data analysis functions. This controller offers several advantages over th ose presently available, including the simultaneous operation of multi ple SRGs (at least four SRGs with a single PC), complete software cont rol of all operating parameters, and significantly improved low-pressu re performance.