CAPACITIVE PRESSURE SENSOR WITH CENTER CLAMPED DIAPHRAGM

Authors
OMI T HORIBATA K SATO F TAKEUCHI M
Citation
T. Omi et al., CAPACITIVE PRESSURE SENSOR WITH CENTER CLAMPED DIAPHRAGM, IEICE transactions on electronics, E80C(2), 1997, pp. 263-268
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
IEICE transactions on electronics → ACNP
ISSN journal
09168524
Volume
E80C
Issue
2
Year of publication
1997
Pages
263 - 268
Database
ISI
SICI code
0916-8524(1997)E80C:2<263:CPSWCC>2.0.ZU;2-K
Abstract
A new silicon capacitive pressure sensor with center clamped diaphragm is presented. The sensor has a silicon-glass structure and is fabrica ted by batch-fabrication processes. Since deformed diaphragm has a dou ghnut-shape, parallel-like displacement is realized and therefore bett er linearity of 0.7% which is half of the conventional flat diaphragm sensor is obtained. It is clarified both analytically and experimental ly that the capacitive pressure sensor with center clamped diaphragm i s advantageous in terms of linearity.