The impact ionization rate in silicon is numerically derived from wave
functions and energy band structure based on an empirical pseudopoten
tial method. The calculated impact ionization rate is well fitted to a
n analytical formula with a power exponent of 4.6, indicating soft thr
eshold of impact ionization rate, which originates from the complexity
of the Si band structure. The calculated impact ionization rate shows
strong anisotropy at low electron energy (epsilon < 3 eV), while it b
ecomes isotropic at higher energy. Numerical calculation also reveals
that the average energy of secondary generated carriers depends linear
ly on the primary electron energy at the moment of their generation. A
full band Monte Carlo simulation using the newly derived impact ioniz
ation rate demonstrates that calculated quantum yield and ionization c
oefficient agree well with reported experimental data.